ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,719,018, issued on Aug. 25, was assigned to Lam Research Corp. (Fremont, Calif.). "Cooling for a plasma-based reactor" was invented by John Ste... Read More
ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,719,019, issued on Aug. 25, was assigned to Tokyo Electron Ltd. (Tokyo). "Plasma processing method and plasma processing apparatus" was invente... Read More
ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,719,020, issued on Aug. 25, was assigned to Tokyo Electron Ltd. (Tokyo). "Plasma processing apparatus and method for controlling source frequen... Read More
ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,719,021, issued on Aug. 25, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "Smart dynamic load simulator for RF power delivery c... Read More
ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,719,022, issued on Aug. 25, was assigned to Lam Research Corp. (Fremont, Calif.) and Advanced Energy Industries Inc. (Denver). "Fast frequency ... Read More
ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,719,023, issued on Aug. 25, was assigned to Shibaura Machine Co. Ltd. (Tokyo). "Surface treatment apparatus" was invented by Rintaro Sueki (Num... Read More
ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,719,024, issued on Aug. 25, was assigned to 6K Inc. (North Andover, Mass.). "Plasma apparatus and methods for processing feed material utilizin... Read More
ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,719,025, issued on Aug. 25, was assigned to Tokyo Electron Ltd. (Tokyo). "Methods for semiconductor process chamber" was invented by Qi Wang (A... Read More
ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,719,026, issued on Aug. 25, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "Rare-earth oxide based erosion resistant coatings fo... Read More
ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,719,027, issued on Aug. 25, was assigned to Tokyo Electron Ltd. (Tokyo). "Plasma processing apparatus" was invented by Takahiro Shindo (Nirasak... Read More